Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9653340 | Heated wafer carrier profiling | Vadim Boguslavskiy, Matthew King, Earl Marcelo, Eric A. Armour, Alexander I. Gurary +2 more | 2017-05-16 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9653340 | Heated wafer carrier profiling | Vadim Boguslavskiy, Matthew King, Earl Marcelo, Eric A. Armour, Alexander I. Gurary +2 more | 2017-05-16 |