Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9806183 | Stress control on thin silicon substrates | Jie Su | 2017-10-31 |
| 9748113 | Method and apparatus for controlled dopant incorporation and activation in a chemical vapor deposition system | Eric A. Armour, Daewon Kwon | 2017-08-29 |