Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9748113 | Method and apparatus for controlled dopant incorporation and activation in a chemical vapor deposition system | Eric A. Armour, George D. Papasouliotis | 2017-08-29 |
| 9627239 | Wafer surface 3-D topography mapping based on in-situ tilt measurements in chemical vapor deposition systems | — | 2017-04-18 |