Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9831073 | Low deflection sputtering target assembly and methods of making same | Eugene Y. Ivanov | 2017-11-28 |
| 9566618 | Silicon sputtering target with special surface treatment and good particle performance and methods of making the same | Eugene Y. Ivanov, Yang Liu, Phil Frausto, Weifang Miao | 2017-02-14 |