Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9566618 | Silicon sputtering target with special surface treatment and good particle performance and methods of making the same | Yongwen Yuan, Eugene Y. Ivanov, Yang Liu, Phil Frausto | 2017-02-14 |
| 9546418 | Diffusion-bonded sputter target assembly and method of manufacturing | David B. Smathers, Eugene Y. Ivanov, Erich Theado, Robert S. Bailey, Jeff Hart | 2017-01-17 |