Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9566618 | Silicon sputtering target with special surface treatment and good particle performance and methods of making the same | Yongwen Yuan, Eugene Y. Ivanov, Yang Liu, Weifang Miao | 2017-02-14 |