Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9831073 | Low deflection sputtering target assembly and methods of making same | Yongwen Yuan | 2017-11-28 |
| 9566618 | Silicon sputtering target with special surface treatment and good particle performance and methods of making the same | Yongwen Yuan, Yang Liu, Phil Frausto, Weifang Miao | 2017-02-14 |
| 9546418 | Diffusion-bonded sputter target assembly and method of manufacturing | Weifang Miao, David B. Smathers, Erich Theado, Robert S. Bailey, Jeff Hart | 2017-01-17 |