Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9721766 | Method for processing target object | Toru Hisamatsu, Masanobu Honda, Tomoyuki Oishi | 2017-08-01 |
| 9607811 | Workpiece processing method | Toru Hisamatsu, Masanobu Honda | 2017-03-28 |
| 9583361 | Method of processing target object and plasma processing apparatus | Hiromi Mochizuki, Masanobu Honda, Masaya Kawamata, Ken Kobayashi, Ryoichi Yoshida | 2017-02-28 |