Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9583361 | Method of processing target object and plasma processing apparatus | Yoshihide Kihara, Masanobu Honda, Masaya Kawamata, Ken Kobayashi, Ryoichi Yoshida | 2017-02-28 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9583361 | Method of processing target object and plasma processing apparatus | Yoshihide Kihara, Masanobu Honda, Masaya Kawamata, Ken Kobayashi, Ryoichi Yoshida | 2017-02-28 |