Issued Patents 2017
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9852922 | Plasma processing method | Hikaru Watanabe | 2017-12-26 |
| 9837285 | Etching method | Maju TOMURA | 2017-12-05 |
| 9735027 | Method for etching organic film | Chungjong Lee, Takayuki Katsunuma | 2017-08-15 |
| 9721766 | Method for processing target object | Yoshihide Kihara, Toru Hisamatsu, Tomoyuki Oishi | 2017-08-01 |
| 9607811 | Workpiece processing method | Yoshihide Kihara, Toru Hisamatsu | 2017-03-28 |
| 9583361 | Method of processing target object and plasma processing apparatus | Yoshihide Kihara, Hiromi Mochizuki, Masaya Kawamata, Ken Kobayashi, Ryoichi Yoshida | 2017-02-28 |