Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9583361 | Method of processing target object and plasma processing apparatus | Yoshihide Kihara, Hiromi Mochizuki, Masanobu Honda, Masaya Kawamata, Ken Kobayashi | 2017-02-28 |
| 9543164 | Etching method | — | 2017-01-10 |