Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9748122 | Thermal processing apparatus and method of controlling the same | Koji Yoshii, Wenling Wang, Takanori Saito | 2017-08-29 |
| 9708507 | Method for improving chemical resistance of polymerized film, polymerized film forming method, film forming apparatus, and electronic product manufacturing method | Kippei Sugita, Yoshinori Morisada, Makoto Fujikawa | 2017-07-18 |
| 9683128 | Polymerized film forming method | Makoto Fujikawa | 2017-06-20 |