Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9841395 | System of inspecting focus ring and method of inspecting focus ring | Tomohide Minami | 2017-12-12 |
| 9708507 | Method for improving chemical resistance of polymerized film, polymerized film forming method, film forming apparatus, and electronic product manufacturing method | Tatsuya Yamaguchi, Yoshinori Morisada, Makoto Fujikawa | 2017-07-18 |