Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9708507 | Method for improving chemical resistance of polymerized film, polymerized film forming method, film forming apparatus, and electronic product manufacturing method | Kippei Sugita, Tatsuya Yamaguchi, Yoshinori Morisada | 2017-07-18 |
| 9683128 | Polymerized film forming method | Tatsuya Yamaguchi | 2017-06-20 |