Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9708507 | Method for improving chemical resistance of polymerized film, polymerized film forming method, film forming apparatus, and electronic product manufacturing method | Kippei Sugita, Tatsuya Yamaguchi, Makoto Fujikawa | 2017-07-18 |