Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9818582 | Plasma processing method | Hiraku MURAKAMI, Nobutaka SASAKI, Takanori BANSE, Hiroshi Tsujimoto, Keigo Toyoda | 2017-11-14 |
| 9613837 | Substrate processing apparatus and maintenance method thereof | Michishige Saito, Daiki Satoh, Ken Horiuchi, Koji Ando, Shingo KOIWA | 2017-04-04 |