Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9831112 | Substrate processing apparatus and substrate detaching method | — | 2017-11-28 |
| 9613837 | Substrate processing apparatus and maintenance method thereof | Shigeru Senzaki, Michishige Saito, Daiki Satoh, Ken Horiuchi, Koji Ando | 2017-04-04 |