Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9818582 | Plasma processing method | Hiraku MURAKAMI, Nobutaka SASAKI, Shigeru Senzaki, Takanori BANSE, Hiroshi Tsujimoto | 2017-11-14 |
| 9728418 | Etching method and etching apparatus | Masaru ISAGO, Hiroshi Tsujimoto | 2017-08-08 |