Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9818582 | Plasma processing method | Hiraku MURAKAMI, Nobutaka SASAKI, Shigeru Senzaki, Takanori BANSE, Keigo Toyoda | 2017-11-14 |
| 9728418 | Etching method and etching apparatus | Keigo Toyoda, Masaru ISAGO | 2017-08-08 |
| 9583315 | Plasma etching apparatus and plasma etching method | Tomoyuki Mizutani | 2017-02-28 |