Issued Patents 2017
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9837308 | Plating method, plating system and storage medium | Nobutaka Mizutani, Takashi Tanaka, Yuichiro Inatomi, Yusuke Saito | 2017-12-05 |
| 9777379 | Plating apparatus, plating method and storage medium | Yuichiro Inatomi, Takashi Tanaka | 2017-10-03 |
| 9731322 | Plating apparatus, plating method and storage medium having plating program stored thereon | Takashi Tanaka, Yusuke Saito, Takayuki Toshima | 2017-08-15 |
| 9725810 | Plating method, plating apparatus and storage medium | Nobutaka Mizutani, Takashi Tanaka | 2017-08-08 |
| 9711363 | Plating method, recording medium and plating system | Nobutaka Mizutani, Takashi Tanaka | 2017-07-18 |
| 9653354 | Metal wiring layer forming method, metal wiring layer forming apparatus, and recording medium | Takashi Tanaka, Nobutaka Mizutani | 2017-05-16 |
| 9653350 | Pre-treatment method for plating and storage medium | Takashi Tanaka, Nobutaka Mizutani, Yusuke Saito | 2017-05-16 |
| 9650717 | Pre-treatment method of plating, storage medium, and plating system | Kazutoshi Iwai, Nobutaka Mizutani | 2017-05-16 |
| 9583330 | Supercritical drying method for semiconductor substrate and supercritical drying apparatus | Linan Ji, Hidekazu Hayashi, Hiroshi Tomita, Hisashi Okuchi, Yohei Sato +5 more | 2017-02-28 |
| 9552994 | Plating apparatus, plating method, and storage medium | Yuichiro Inatomi, Takashi Tanaka, Nobutaka Mizutani, Yusuke Saito | 2017-01-24 |