Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9847239 | Substrate processing apparatus | — | 2017-12-19 |
| 9837308 | Plating method, plating system and storage medium | Nobutaka Mizutani, Takashi Tanaka, Yusuke Saito, Mitsuaki Iwashita | 2017-12-05 |
| 9777379 | Plating apparatus, plating method and storage medium | Takashi Tanaka, Mitsuaki Iwashita | 2017-10-03 |
| 9761485 | Catalyst layer forming method, catalyst layer forming system, and recording medium | Takashi Tanaka | 2017-09-12 |
| 9552994 | Plating apparatus, plating method, and storage medium | Takashi Tanaka, Nobutaka Mizutani, Yusuke Saito, Mitsuaki Iwashita | 2017-01-24 |