Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9646848 | Etching method, etching apparatus and storage medium | Satoshi TODA, Hiroyuki Takahashi | 2017-05-09 |
| 9536745 | Tungsten film forming method | Takanobu HOTTA, Tomohisa Maruyama, Yasushi Aiba | 2017-01-03 |