Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9536745 | Tungsten film forming method | Kensaku Narushima, Takanobu HOTTA, Tomohisa Maruyama | 2017-01-03 |
| 9536782 | Tungsten film forming method, semiconductor device manufacturing method, and storage medium | Takanobu HOTTA, Koji Maekawa | 2017-01-03 |