Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9640404 | Method of forming tungsten film | Kenji Suzuki, Koji Maekawa | 2017-05-02 |
| 9536745 | Tungsten film forming method | Kensaku Narushima, Tomohisa Maruyama, Yasushi Aiba | 2017-01-03 |
| 9536782 | Tungsten film forming method, semiconductor device manufacturing method, and storage medium | Yasushi Aiba, Koji Maekawa | 2017-01-03 |