Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9691631 | Etching method and storage medium | Kenshirou Asahi, Hiroyuki Takahashi, Kimihiko DEMICHI | 2017-06-27 |
| 9646848 | Etching method, etching apparatus and storage medium | Kensaku Narushima, Hiroyuki Takahashi | 2017-05-09 |