Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9627237 | Apparatus, method and non-transitory storage medium for accommodating and processing a substrate | Akihiro Matsumoto, Michiaki Matsushita, Satoru Shinto | 2017-04-18 |
| 9627238 | Substrate transfer apparatus, substrate transfer method, and storage medium | Katsuhiro Morikawa, Ikuo Sunaka, Seiji Nakano, Toshio Shimazu | 2017-04-18 |