Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9627238 | Substrate transfer apparatus, substrate transfer method, and storage medium | Katsuhiro Morikawa, Ikuo Sunaka, Seiji Nakano, Kazunori Kuratomi | 2017-04-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9627238 | Substrate transfer apparatus, substrate transfer method, and storage medium | Katsuhiro Morikawa, Ikuo Sunaka, Seiji Nakano, Kazunori Kuratomi | 2017-04-18 |