Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9773690 | Substrate processing apparatus, substrate processing system, and method of detecting abnormality in transport container | Katsuhiro Morikawa, Suguru Enokida | 2017-09-26 |
| 9696262 | Substrate processing apparatus, method of operating substrate processing apparatus, and storage medium | Katsuhiro Morikawa | 2017-07-04 |
| 9627238 | Substrate transfer apparatus, substrate transfer method, and storage medium | Katsuhiro Morikawa, Seiji Nakano, Kazunori Kuratomi, Toshio Shimazu | 2017-04-18 |