Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9773690 | Substrate processing apparatus, substrate processing system, and method of detecting abnormality in transport container | Katsuhiro Morikawa, Ikuo Sunaka | 2017-09-26 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9773690 | Substrate processing apparatus, substrate processing system, and method of detecting abnormality in transport container | Katsuhiro Morikawa, Ikuo Sunaka | 2017-09-26 |