Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9627237 | Apparatus, method and non-transitory storage medium for accommodating and processing a substrate | Akihiro Matsumoto, Satoru Shinto, Kazunori Kuratomi | 2017-04-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9627237 | Apparatus, method and non-transitory storage medium for accommodating and processing a substrate | Akihiro Matsumoto, Satoru Shinto, Kazunori Kuratomi | 2017-04-18 |