Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9829806 | Lithography tool with backside polisher | Kuo-Hsiu Wei, Kei-Wei Chen, Huai-Tei Yang, Ying-Lang Wang | 2017-11-28 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9829806 | Lithography tool with backside polisher | Kuo-Hsiu Wei, Kei-Wei Chen, Huai-Tei Yang, Ying-Lang Wang | 2017-11-28 |