Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9829806 | Lithography tool with backside polisher | Tang-Kuei Chang, Kuo-Hsiu Wei, Kei-Wei Chen, Ying-Lang Wang | 2017-11-28 |
| 9722081 | FinFET device and method of forming the same | Chun Hsiung Tsai, Chien-Tai Chan, Ziwei Fang, Kei-Wei Chen | 2017-08-01 |
| 9627212 | Methods and systems for dopant activation using microwave radiation | Chun Hsiung Tsai, Kuo-Feng Yu, Kei-Wei Chen | 2017-04-18 |
| 9564513 | Epitaxy in semiconductor structure and manufacturing method thereof | Shih-Chieh Chang, Ying-Min Chou, Yi-Ming Huang, Chun-Ju Huang, Kei-Wei Chen | 2017-02-07 |
| 9543387 | Semiconductor device and manufacturing method thereof | Shih-Chieh Chang, Ying-Min Chou, Yi-Ming Huang, Wen-Chu Hsiao, Hsiu-Ting Chen | 2017-01-10 |