Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9842743 | Method of etching a shallow trench | Zaifeng Tang, Minjie Chen, Yu Ren, Yukun Lv | 2017-12-12 |
| 9666472 | Method for establishing mapping relation in STI etch and controlling critical dimension of STI | Qiyan Feng, Yu Ren, Yukun Lv, Xusheng Zhang | 2017-05-30 |