Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9666472 | Method for establishing mapping relation in STI etch and controlling critical dimension of STI | Jin Xu, Yu Ren, Yukun Lv, Xusheng Zhang | 2017-05-30 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9666472 | Method for establishing mapping relation in STI etch and controlling critical dimension of STI | Jin Xu, Yu Ren, Yukun Lv, Xusheng Zhang | 2017-05-30 |