Issued Patents 2017
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9842743 | Method of etching a shallow trench | Jin Xu, Zaifeng Tang, Minjie Chen, Yukun Lv | 2017-12-12 |
| 9666472 | Method for establishing mapping relation in STI etch and controlling critical dimension of STI | Jin Xu, Qiyan Feng, Yukun Lv, Xusheng Zhang | 2017-05-30 |
| 9658055 | Accuracy traceability method based on precision coordinate control network for workshop measurement positioning system | Jigui Zhu, Jiarui LIN, Yongjie Ren, Linghui Yang | 2017-05-23 |