Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9842743 | Method of etching a shallow trench | Jin Xu, Zaifeng Tang, Minjie Chen, Yu Ren | 2017-12-12 |
| 9666472 | Method for establishing mapping relation in STI etch and controlling critical dimension of STI | Jin Xu, Qiyan Feng, Yu Ren, Xusheng Zhang | 2017-05-30 |