Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9826615 | EUV collector with orientation to avoid contamination | Jian-Yuan Su, Kuo-Hung Chao, Jui-Chun Peng | 2017-11-21 |
| 9587929 | Focus metrology method and photolithography method and system | Jui-Chun Peng, Heng-Hsin Liu, Yung-Yao Lee | 2017-03-07 |