Issued Patents 2017
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9852932 | Method for processing semiconductor wafer | Mao-Lin Kao, Jiun-Rong Pai, Li-Jen Ko, Hsiang Yin Shen, Tien-Chen Hu | 2017-12-26 |
| 9852936 | Load port and method for loading and unloading cassette | Chien-Fa Lee, Jiun-Rong Pai, Shou-Wen Kuo | 2017-12-26 |
| 9786530 | Wafer transfer method and system | Chien-Fa Lee, Jiun-Rong Pai, Shou-Wen Kuo | 2017-10-10 |
| 9786539 | Wafer chuck | Yeh-Chieh Wang, Jiun-Rong Pai, Cheng-Lung Lee, Kuang-Chung Liou | 2017-10-10 |
| 9741600 | Semiconductor apparatus with transportable edge ring for substrate transport | Chih-Chang Hsieh, Chung-Chieh Hsu, Chian-kun Chan, Chih-Kuo Chang, Chih-Ping Chen +3 more | 2017-08-22 |
| 9558974 | Semiconductor processing station and method for processing semiconductor wafer | Mao-Lin Kao, Tien-Chen Hu, Li-Jen Ko, Hsiang Yin Shen, Jiun-Rong Pai | 2017-01-31 |