Issued Patents 2017
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9852932 | Method for processing semiconductor wafer | Mao-Lin Kao, Hsu-Shui Liu, Li-Jen Ko, Hsiang Yin Shen, Tien-Chen Hu | 2017-12-26 |
| 9852936 | Load port and method for loading and unloading cassette | Chien-Fa Lee, Hsu-Shui Liu, Shou-Wen Kuo | 2017-12-26 |
| 9786530 | Wafer transfer method and system | Chien-Fa Lee, Hsu-Shui Liu, Shou-Wen Kuo | 2017-10-10 |
| 9786539 | Wafer chuck | Yeh-Chieh Wang, Hsu-Shui Liu, Cheng-Lung Lee, Kuang-Chung Liou | 2017-10-10 |
| 9558974 | Semiconductor processing station and method for processing semiconductor wafer | Mao-Lin Kao, Hsu-Shui Liu, Tien-Chen Hu, Li-Jen Ko, Hsiang Yin Shen | 2017-01-31 |
| 9543181 | Replaceable electrostatic chuck sidewall shield | Hsi-Shui Liu, Yeh-Chieh Wang | 2017-01-10 |