Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9835952 | Systems and methods for a narrow band high transmittance interference filter | Wolf Hung, Chung-Nan Chen, Jaw-Lih Shih, Hong-Hsing Chou | 2017-12-05 |
| 9786539 | Wafer chuck | Jiun-Rong Pai, Hsu-Shui Liu, Cheng-Lung Lee, Kuang-Chung Liou | 2017-10-10 |
| 9620326 | Arc chamber with multiple cathodes for an ion source | Chin-Tsung Lin, Hsiao-Yin HSIEH, Chi-Hao Huang, Hong-Shing Chou | 2017-04-11 |
| 9550270 | Temperature modification for chemical mechanical polishing | Jung-Lung Hung, Rong-June Hsiao, Chi-Hao Huang, Hong-Hsing Chou | 2017-01-24 |
| 9543181 | Replaceable electrostatic chuck sidewall shield | Hsi-Shui Liu, Jiun-Rong Pai | 2017-01-10 |