Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9741600 | Semiconductor apparatus with transportable edge ring for substrate transport | Chih-Chang Hsieh, Chian-kun Chan, Chih-Kuo Chang, Chih-Ping Chen, Hsu-Shui Liu +3 more | 2017-08-22 |