Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9852899 | Wafer back-side polishing system and method for integrated circuit device manufacturing processes | Shen-Nan Lee, Teng-Chun Tsai, Chang-Sheng Lin, Kuo-Cheng Lien, Kuo-Yin Lin +2 more | 2017-12-26 |
| 9597771 | Carrier head having retainer ring, polishing system including the carrier head and method of using the polishing system | Chang-Sheng Lin | 2017-03-21 |
| 9601409 | Protruding contact for integrated chip | Chia-Fang Tsai | 2017-03-21 |
| 9576789 | Apparatus, method, and composition for far edge wafer cleaning | Ting-Kui Chang, Jung-Tsan Tsai | 2017-02-21 |
| 9559021 | Wafer back-side polishing system and method for integrated circuit device manufacturing processes | Shen-Nan Lee, Teng-Chun Tsai, Chang-Sheng Lin, Kuo-Cheng Lien, Kuo-Yin Lin +2 more | 2017-01-31 |