Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9576789 | Apparatus, method, and composition for far edge wafer cleaning | Hsin-Hsien Lu, Jung-Tsan Tsai | 2017-02-21 |
TC
Ting-Kui Chang
Overall (2017): #216,647 of 506,227Top 45%
1
Patents 2017