Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9716012 | Methods of selective layer deposition | David Thompson, Huixiong Dai, Patrick M. Martin, Timothy Michaelson, Kadthala Ramaya Narendrnath +2 more | 2017-07-25 |
| 9576815 | Gas-phase silicon nitride selective etch | Fei Wang, Anchuan Wang, Nitin K. Ingle, Robert Jan Visser | 2017-02-21 |
| 9564341 | Gas-phase silicon oxide selective etch | Anchuan Wang, Nitin K. Ingle | 2017-02-07 |