Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9601357 | Substrate processing device and substrate processing method | Koji Hashimoto, Masahiro Miyagi | 2017-03-21 |
| 9576831 | Substrate container, a load port apparatus, and a substrate treating apparatus | Akito Hatano, Koji Hashimoto, Kazuhiro Honsho | 2017-02-21 |