Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9810532 | Substrate treating apparatus and substrate treating methods | Koji Hashimoto, Toyohide Hayashi, Keiichi Tsuchiya | 2017-11-07 |
| 9576831 | Substrate container, a load port apparatus, and a substrate treating apparatus | Koji Hashimoto, Kazuhiro Honsho, Mitsukazu Takahashi | 2017-02-21 |