Issued Patents 2017
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9810532 | Substrate treating apparatus and substrate treating methods | Koji Hashimoto, Akito Hatano, Keiichi Tsuchiya | 2017-11-07 |
| 9607844 | Substrate processing method and substrate processing apparatus | Jiro Okuda, Naohiko YOSHIHARA | 2017-03-28 |