Issued Patents 2017
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9576831 | Substrate container, a load port apparatus, and a substrate treating apparatus | Akito Hatano, Koji Hashimoto, Mitsukazu Takahashi | 2017-02-21 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9576831 | Substrate container, a load port apparatus, and a substrate treating apparatus | Akito Hatano, Koji Hashimoto, Mitsukazu Takahashi | 2017-02-21 |