Issued Patents 2017
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9852931 | Substrate processing apparatus | Masanobu Sato, Hiroyuki Araki | 2017-12-26 |
| 9713822 | Substrate processing apparatus | Koji Hashimoto, Toru Endo | 2017-07-25 |
| 9640382 | Substrate processing apparatus and substrate processing method | Hirofumi MASUHARA, Kenichiro Arai, Toru Endo | 2017-05-02 |
| 9601357 | Substrate processing device and substrate processing method | Koji Hashimoto, Mitsukazu Takahashi | 2017-03-21 |
| 9576808 | Substrate processing apparatus and substrate processing method | Hirofumi MASUHARA, Kenichiro Arai, Toru Endo | 2017-02-21 |