Issued Patents 2017
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9852931 | Substrate processing apparatus | Masahiro Miyagi, Masanobu Sato | 2017-12-26 |
| 9839174 | Work vehicle cooperation system | Yoshitomo Fujimoto, Yasuhisa Uoya | 2017-12-12 |
| 9539589 | Substrate processing apparatus, and nozzle | — | 2017-01-10 |